DSpace at KISTKIST Patent2018

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dc.contributor.author박승영-
dc.contributor.author민병철-
dc.contributor.author김상일-
dc.contributor.author조영훈-
dc.date.accessioned2024-01-12T06:42:43Z-
dc.date.available2024-01-12T06:42:43Z-
dc.date.issued2020-05-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/80004-
dc.title웨이퍼 검사장치-
dc.typePatent-
dc.date.registration2020-05-05-
dc.date.application2018-05-08-
dc.identifier.patentRegistrationNumber10,641,714-
dc.identifier.patentApplicationNumber15/974,111-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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