DSpace at KISTKIST Patent2016

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dc.contributor.author김상현-
dc.contributor.author김형준-
dc.contributor.author최원준-
dc.contributor.author심재필-
dc.contributor.author김성광-
dc.date.accessioned2024-01-12T06:43:47Z-
dc.date.available2024-01-12T06:43:47Z-
dc.date.issued2019-01-08-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/80056-
dc.title전압을 인가하여 에피택셜 리프트오프 공정을 고속화하기 위한 반도체 소자의 제조 방법 및 식각 장비-
dc.typePatent-
dc.date.registration2019-01-08-
dc.date.application2016-09-28-
dc.identifier.patentRegistrationNumber10-1938230-
dc.identifier.patentApplicationNumber2016-0124630-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2016
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