Molecular Based Detection using Piezoelectric Thin Film Caoted Microcantielver

Abstract

We have developed piezoelectric thin film layer-embedded microcantilever which is able to quickly convert between mechanical vibration and electrical charge inducing for the application to biological substance detection with high measuring performance. These piezoelectric driven microcantilevers provided the application feasibility in a nanomechanical point-of-care diagnosis by enabling electrical measurement of sensor's response signal because it did not have to use bulky optical system In our earlier researches, the fabricated piezoelectric cantilevers by surface and bulk micromachining process utilized as excellent platform for biomolecules detection such as disease related proteins [1, 2], DNA with specific sequence [3], enzyme [4]. Recently, we have tried to expand the application field in addition to biomolecule detection in liquid sample. Here, in this presentation, we are going to introduce and propose our new approaches to several application using piezoelectric driven microcantilevers.