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입방정질화붕소 박막 제조방법 및 이를 통해 제조된 입방정질화붕소 박막 구조물

Author

박종극; 백영준; 이욱성

Assignee

한국과학기술연구원

Regitration Date

2012-07-06

Registration No.

1165329

Application Date

2012-05-03

Application No.

2012-0046828

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/80653

Appears in Collections:

KIST Patent > 2012

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