DSpace at KISTKIST Patent2011

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dc.contributor.author최지원-
dc.contributor.author손영진-
dc.contributor.author정근-
dc.contributor.author윤석진-
dc.contributor.author최원국-
dc.date.accessioned2024-01-12T07:14:15Z-
dc.date.available2024-01-12T07:14:15Z-
dc.date.issued2013-04-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/80735-
dc.title박막 증착 및 조성 탐색용 스퍼터링 장치-
dc.typePatent-
dc.date.registration2013-04-11-
dc.date.application2011-06-28-
dc.identifier.patentRegistrationNumber10-1255524-
dc.identifier.patentApplicationNumber2011-0062861-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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