High performance piezoelectric MEMS energy harvester based on D33 mode of PZT thin film on buffer-layer with PbTiO3 inter-layer

Abstract

In this paper, a MEMS energy harvester was investigated to scavenge power from ambient vibration source. It was designed to convert low level vibration to electrical power via the piezoelectric effect. The proposed energy harvester was fabricated by patterning Pt electrodes into inter-digital geometry on top of the sol-gel-spin coated Pb(Zr,Ti)O3 thin film for d33 mode on silicon cantilever with proof mass. In order to obtain well grown PZT thin film, PbTiO3 seed-layer was newly applied as an inter-layer between PZT and ZrO2 layer. The fabricated energy harvester generated 1.1uW of electrical power to 2.2MΩ of load with 4.4Vpeak-to-peak from a vibration of 0.39g acceleration at it resonant frequency of 528Hz. The corresponding power density was 2.8mW·cm-3·g -1. ？2009 IEEE.