DSpace at KISTKIST Patent2001

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dc.contributor.author최원국-
dc.contributor.author윤덕주-
dc.contributor.author송재훈-
dc.contributor.author오희범-
dc.contributor.author정형진-
dc.date.accessioned2024-01-12T08:06:45Z-
dc.date.available2024-01-12T08:06:45Z-
dc.date.issued2004-08-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81699-
dc.title가스 클러스터 이온빔을 이용한 아이.티.오 박막 표면처리 시스템 및 그 방법-
dc.typePatent-
dc.date.registration2004-08-10-
dc.date.application2001-10-25-
dc.identifier.patentRegistrationNumber0445105-
dc.identifier.patentApplicationNumber2001-0066053-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2001
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