Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 민석기 | - |
| dc.contributor.author | 김용태 | - |
| dc.date.accessioned | 2024-01-12T08:09:55Z | - |
| dc.date.available | 2024-01-12T08:09:55Z | - |
| dc.date.issued | 1996-04-25 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/81845 | - |
| dc.title | 실리콘 반도체소자의 금속배선 형성용텅스텐 질화 박막증착방법 | - |
| dc.type | Patent | - |
| dc.date.registration | 1996-04-25 | - |
| dc.date.application | 1992-01-24 | - |
| dc.identifier.patentRegistrationNumber | 2048184 | - |
| dc.identifier.patentApplicationNumber | 4-11118 | - |
| dc.publisher.country | JA | - |
| dc.type.iprs | 특허 | - |
| dc.contributor.assignee | 한국과학기술연구원 | - |
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- KIST Patent > Others
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