KIST Library Institutional Repository

텅스텐　박막제조용　플라즈마　화학증착온도　측정장치

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1993-10-06

Registration No.

66194

Application Date

1991-07-09

Application No.

91-11617

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/81856

Appears in Collections:

KIST Patent > Others

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