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dc.contributor.author은광용-
dc.contributor.author이광렬-
dc.date.accessioned2024-01-12T08:10:57Z-
dc.date.available2024-01-12T08:10:57Z-
dc.date.issued1997-12-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/81893-
dc.title고주파　플라즈마　화학증착법을　이용한원형　기판용　코팅층의　대량　합성장　치　및　합성방법-
dc.typePatent-
dc.date.registration1997-12-05-
dc.date.application1994-08-17-
dc.identifier.patentRegistrationNumber131987-
dc.identifier.patentApplicationNumber94-20259-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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