DSpace at KISTKIST Conference Paper2005

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dc.contributor.authorCHO, IL JOO-
dc.date.accessioned2024-01-12T08:17:56Z-
dc.date.available2024-01-12T08:17:56Z-
dc.date.created2022-01-14-
dc.date.issued2005-01-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82072-
dc.publisherIEEE-
dc.titleIntegrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationProceedings of the 17th IEEE International Conference on MEMS, pp.247 - 250-
dc.citation.titleProceedings of the 17th IEEE International Conference on MEMS-
dc.citation.startPage247-
dc.citation.endPage250-
dc.citation.conferencePlaceUS-
dc.relation.isPartOfProceedings of the 17th IEEE International Conference on MEMS-
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