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이온빔을　이용한　산화물　기판표면의 전처리방법　및　이를　이용한　질화물 박막　형성　방법

Author

고석근; 정형진; 변동진; 금동화; 최원국

Assignee

한국과학기술연구원

Regitration Date

2000-08-08

Registration No.

6,099,917

Application Date

1998-11-17

Application No.

09/192,997

Country

US

URI

https://pubs.kist.re.kr/handle/201004/82258

Appears in Collections:

KIST Patent > Others

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