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dc.contributor.author이재갑-
dc.contributor.author은광용-
dc.contributor.author백영준-
dc.date.accessioned2024-01-12T08:37:45Z-
dc.date.available2024-01-12T08:37:45Z-
dc.date.issued2002-09-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82306-
dc.title직류전원플라즈마화학증착법에 의한 다이아몬드막 합성장치-
dc.typePatent-
dc.date.registration2002-09-03-
dc.date.application2000-05-02-
dc.identifier.patentRegistrationNumber6,443,092-
dc.identifier.patentApplicationNumber09/563,481-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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