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dc.contributor.author나종갑-
dc.date.accessioned2024-01-12T08:38:21Z-
dc.date.available2024-01-12T08:38:21Z-
dc.date.issued2002-03-04-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82334-
dc.title박막용 스파터링 타켓-
dc.typePatent-
dc.date.registration2002-03-04-
dc.date.application2000-04-17-
dc.identifier.patentRegistrationNumber328658-
dc.identifier.patentApplicationNumber00-19996-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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