Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 나종갑 | - |
dc.date.accessioned | 2024-01-12T08:38:21Z | - |
dc.date.available | 2024-01-12T08:38:21Z | - |
dc.date.issued | 2002-03-04 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/82334 | - |
dc.title | 박막용 스파터링 타켓 | - |
dc.type | Patent | - |
dc.date.registration | 2002-03-04 | - |
dc.date.application | 2000-04-17 | - |
dc.identifier.patentRegistrationNumber | 328658 | - |
dc.identifier.patentApplicationNumber | 00-19996 | - |
dc.publisher.country | KO | - |
dc.type.iprs | 특허 | - |
dc.contributor.assignee | 한국과학기술연구원 | - |
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