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dc.contributor.author송진동-
dc.contributor.author강준현-
dc.contributor.author양현덕-
dc.contributor.author한일기-
dc.date.accessioned2024-01-12T09:05:48Z-
dc.date.available2024-01-12T09:05:48Z-
dc.date.issued2020-07-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/82849-
dc.titleIII-인화계 기판상에 III-비화계 에피층을 성장하는 방법-
dc.typePatent-
dc.date.registration2020-07-02-
dc.date.application2018-06-12-
dc.identifier.patentRegistrationNumber10-2131619-
dc.identifier.patentApplicationNumber10-2018-0067504-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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