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dc.contributor.authorLEE, YEON HEE-
dc.date.accessioned2024-01-12T09:13:51Z-
dc.date.available2024-01-12T09:13:51Z-
dc.date.created2022-01-14-
dc.date.issued2002-11-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/83189-
dc.titleSurface properties and characterization of plasma source ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSurface Analysis Society of Japan, pp.0-
dc.citation.titleSurface Analysis Society of Japan-
dc.citation.startPage0-
dc.citation.endPage0-
dc.relation.isPartOfKorea-Japan International Symposium on Surface Analysis - 직접입력-
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KIST Conference Paper > 2002
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