Multiple Magnification Images Based Micropositioning for 3D Micro Assembly

Abstract

This paper presents micropositioning system using feedback of multiple magnification images from CCD cameras mounted on an optical microscope. In order to guarantee of the accurate micropositioning to micro assembly system, high precise sensors are required. But many kinds of sensors, which are used in macro world, have insufficient resolution and size. The visual data from an optical microscope have vast information, however, the single field-of-view of optical microscope essentially limits the workspace of the micromanipulator and the low depth-of-field makes it difficult to handle micro parts. To overcome these problems and increase and precision of micropositioning system, we use multiple magnification images that have same viewpoint. The use of multiple magnification images reduces the time consuming for handling of micro parts and increases precision of micropositioning. We propose this method for micropositioning system.