DSpace at KISTKIST Patent2014

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dc.contributor.author전영민-
dc.contributor.author김용수-
dc.contributor.author안준모-
dc.contributor.author서민아-
dc.contributor.author우덕하-
dc.contributor.author박민철-
dc.contributor.author변영태-
dc.contributor.author김철기-
dc.contributor.author이석-
dc.contributor.author김재헌-
dc.date.accessioned2024-01-12T09:31:47Z-
dc.date.available2024-01-12T09:31:47Z-
dc.date.issued2015-07-30-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/83390-
dc.title다중 가스셀 모듈을 이용한 극자외선 빔 생성장치-
dc.typePatent-
dc.date.registration2015-07-30-
dc.date.application2014-12-26-
dc.identifier.patentRegistrationNumber10-1542333-
dc.identifier.patentApplicationNumber10-2014-0191162-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2014
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