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초소형기계시스템의 공진특성 분석을 통한 박막의 기계적특성 평가

Authors

Jeong, Jeung hyun

Issue Date

2002-01-01

Citation

대한기계학회

URI

https://pubs.kist.re.kr/handle/201004/83666

Appears in Collections:

KIST Conference Paper > 2002

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