집속이온빔을 이용한 나노결정체 형성방법

Author
김은규심재환김태환박용주강승언추동철
Assignee
한국과학기술연구원
Regitration Date
2002-11-05
Registration No.
6,475,886
Application Date
2001-12-26
Application No.
10/025,696
Country
US
URI
https://pubs.kist.re.kr/handle/201004/84651
Appears in Collections:
KIST Patent > 2001
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