Full metadata record

DC Field Value Language
dc.contributor.authorLEE, YEON HEE-
dc.date.accessioned2024-01-12T10:40:05Z-
dc.date.available2024-01-12T10:40:05Z-
dc.date.created2022-01-14-
dc.date.issued1999-12-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/84862-
dc.titleMeasurement of sheath expansion in plasma source ion implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationPBII, pp.0-
dc.citation.titlePBII-
dc.citation.startPage0-
dc.citation.endPage0-
dc.relation.isPartOfInternational Workshop on Plasma based Ion Implantation - 직접입력-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE