KIST Library Institutional Repository

플라즈마　화학증착법을　이용한　갈륨비소　반도체소자의　쇼트키접합　및　금속배선용　텅스텐박막　형성방법

Author

김용태; 민석기

Assignee

한국과학기술연구원

Regitration Date

1995-06-28

Registration No.

86154

Application Date

1992-04-03

Application No.

92-5596

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85031

Appears in Collections:

KIST Patent > Others

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