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dc.contributor.author김영욱-
dc.contributor.author김인섭-
dc.contributor.author박성훈-
dc.contributor.author이준근-
dc.date.accessioned2024-01-12T11:01:00Z-
dc.date.available2024-01-12T11:01:00Z-
dc.date.issued1997-06-16-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85054-
dc.title열충격내성이　개량된　반도체　웨이퍼처리용　탄화규소　피복　흑연치구　및　그의　제조방법-
dc.typePatent-
dc.date.registration1997-06-16-
dc.date.application1993-11-27-
dc.identifier.patentRegistrationNumber0116430-
dc.identifier.patentApplicationNumber1993-0025547-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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