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dc.contributor.author김회종-
dc.contributor.author강광남-
dc.contributor.author이정일-
dc.contributor.author이명복-
dc.contributor.author최원준-
dc.contributor.author이유종-
dc.contributor.author한일기-
dc.date.accessioned2024-01-12T11:01:31Z-
dc.date.available2024-01-12T11:01:31Z-
dc.date.issued1997-12-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85077-
dc.title전자빔　리소그래피　장치　및　이를　이용한　다층　정렬　방법-
dc.typePatent-
dc.date.registration1997-12-11-
dc.date.application1994-06-01-
dc.identifier.patentRegistrationNumber132539-
dc.identifier.patentApplicationNumber94-12262-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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