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주기율표III-V족　화합물　반도체의 건식　에칭방법

Author

민석기; 김은규

Assignee

한국과학기술연구원

Regitration Date

1998-03-20

Registration No.

141417

Application Date

1994-12-12

Application No.

94-33715

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85100

Appears in Collections:

KIST Patent > Others

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