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dc.contributor.author박달근-
dc.contributor.author우주만-
dc.contributor.author이중기-
dc.date.accessioned2024-01-12T11:03:13Z-
dc.date.available2024-01-12T11:03:13Z-
dc.date.issued1999-10-13-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85151-
dc.title화학증착시스템에서　배출되는　미반응　유독가스의　정화　장치　및　방법-
dc.typePatent-
dc.date.registration1999-10-13-
dc.date.application1998-01-13-
dc.identifier.patentRegistrationNumber0238387-
dc.identifier.patentApplicationNumber1998-0000641-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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