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Influence of rapid thermal annealing of cerium oxide on the morphological and electrical properties of metal/ferroelectric/insulator /semiconductor capacitor

Authors

Kim, Yong Tae

Issue Date

1998-07-01

Citation

IUMRS-IECM-'98, pp.0

URI

https://pubs.kist.re.kr/handle/201004/85391

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KIST Conference Paper > Others

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