Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Yong Tae | - |
| dc.date.accessioned | 2024-01-12T11:09:29Z | - |
| dc.date.available | 2024-01-12T11:09:29Z | - |
| dc.date.created | 2022-01-14 | - |
| dc.date.issued | 1998-07-01 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/85402 | - |
| dc.title | Effects of boron on diffusion barrier characteristics of PECVD W-B-N films | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | Mater. Res.Soc., pp.0 | - |
| dc.citation.title | Mater. Res.Soc. | - |
| dc.citation.startPage | 0 | - |
| dc.citation.endPage | 0 | - |
- Appears in Collections:
- KIST Conference Paper > Others
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