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dc.contributor.author김형준-
dc.contributor.author김상현-
dc.contributor.author임희정-
dc.contributor.author김연수-
dc.contributor.author심재필-
dc.date.accessioned2024-01-12T12:01:12Z-
dc.date.available2024-01-12T12:01:12Z-
dc.date.issued2019-12-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86197-
dc.title변형된 저마늄을 포함하는 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자-
dc.typePatent-
dc.date.registration2019-12-10-
dc.date.application2017-01-26-
dc.identifier.patentRegistrationNumber10504771-
dc.identifier.patentApplicationNumber15/416727-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2017
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