Full metadata record
| DC Field | Value | Language | 
|---|---|---|
| dc.contributor.author | 김재훈 | - | 
| dc.contributor.author | 박종민 | - | 
| dc.contributor.author | 송길훈 | - | 
| dc.contributor.author | 구교욱 | - | 
| dc.contributor.author | 배정용 | - | 
| dc.contributor.author | 김우영 | - | 
| dc.contributor.author | 최진영 | - | 
| dc.date.accessioned | 2024-01-12T12:32:33Z | - | 
| dc.date.available | 2024-01-12T12:32:33Z | - | 
| dc.date.issued | 2013-11-07 | - | 
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/86822 | - | 
| dc.title | 기판건조장치 및 기판건조방법 | - | 
| dc.type | Patent | - | 
| dc.date.registration | 2013-11-07 | - | 
| dc.date.application | 2011-12-07 | - | 
| dc.identifier.patentRegistrationNumber | 10-1329317 | - | 
| dc.identifier.patentApplicationNumber | 10-2011-0130298 | - | 
| dc.publisher.country | KO | - | 
| dc.type.iprs | 특허 | - | 
| dc.contributor.assignee | 한국과학기술연구원 | - | 
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