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반도체 제조 장비용 다성분계 열용사 코팅물질, 그 제조방법 및 코팅방법

Author

석현광; 백경호; 김유찬

Assignee

한국과학기술연구원

Regitration Date

2013-08-21

Registration No.

I405743

Application Date

2009-11-05

Application No.

98137573

Country

ZZ

URI

https://pubs.kist.re.kr/handle/201004/86955

Appears in Collections:

KIST Patent > 2009

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