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dc.contributor.author주오심-
dc.contributor.author이은호-
dc.contributor.authorC.D.LOKHANDE-
dc.contributor.author정광덕-
dc.date.accessioned2024-01-12T13:04:47Z-
dc.date.available2024-01-12T13:04:47Z-
dc.date.issued2006-02-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87472-
dc.title화학증착법을 이용한 티타늄 산화물 박막의 제조방법-
dc.typePatent-
dc.date.registration2006-02-20-
dc.date.application2003-12-02-
dc.identifier.patentRegistrationNumber0555293-
dc.identifier.patentApplicationNumber2003-0086681-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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