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dc.contributor.author김용태-
dc.contributor.author민석기-
dc.date.accessioned2024-01-12T13:32:07Z-
dc.date.available2024-01-12T13:32:07Z-
dc.date.issued1993-08-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87936-
dc.title텅스텐　박막제조용　플라즈마　화학증착온도　측정장치-
dc.typePatent-
dc.date.registration1993-08-03-
dc.date.application1992-07-08-
dc.identifier.patentRegistrationNumber5,232,509-
dc.identifier.patentApplicationNumber07/910,061-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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