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dc.contributor.author김회종-
dc.contributor.author강광남-
dc.contributor.author이정일-
dc.contributor.author우덕하-
dc.contributor.author이석-
dc.contributor.author이유종-
dc.contributor.author이명복-
dc.contributor.author우덕하-
dc.date.accessioned2024-01-12T13:32:51Z-
dc.date.available2024-01-12T13:32:51Z-
dc.date.issued1997-08-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87968-
dc.title다층　마스크패턴의　결함　수정방법-
dc.typePatent-
dc.date.registration1997-08-28-
dc.date.application1994-05-28-
dc.identifier.patentRegistrationNumber121563-
dc.identifier.patentApplicationNumber94-11792-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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