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dc.contributor.author이욱성-
dc.contributor.author은광용-
dc.contributor.author백영준-
dc.date.accessioned2024-01-12T13:33:27Z-
dc.date.available2024-01-12T13:33:27Z-
dc.date.issued1996-10-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87994-
dc.title고밀도 직류글로우 방전에 의한 다이아몬드막 증착방법-
dc.typePatent-
dc.date.registration1996-10-10-
dc.date.application1993-12-29-
dc.identifier.patentRegistrationNumber105960-
dc.identifier.patentApplicationNumber93-30636-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > Others
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