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dc.contributor.author주병권-
dc.contributor.author이윤희-
dc.contributor.author오명환-
dc.date.accessioned2024-01-12T13:33:41Z-
dc.date.available2024-01-12T13:33:41Z-
dc.date.issued1998-05-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88004-
dc.title결정의존성　습식식각을　이용하여　제조된　실리콘　팁　및　그　제조방법-
dc.typePatent-
dc.date.registration1998-05-21-
dc.date.application1995-04-15-
dc.identifier.patentRegistrationNumber148067-
dc.identifier.patentApplicationNumber95-8890-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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