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dc.contributor.author고석근-
dc.contributor.author조준식-
dc.contributor.author백영환-
dc.contributor.author한영건-
dc.date.accessioned2024-01-12T13:36:30Z-
dc.date.available2024-01-12T13:36:30Z-
dc.date.issued2004-09-07-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88127-
dc.title고분자 기판 위의 인듐산화물 또는 인듐주석산화물 박막증착 방법-
dc.typePatent-
dc.date.registration2004-09-07-
dc.date.application2002-11-13-
dc.identifier.patentRegistrationNumber6,787,441-
dc.identifier.patentApplicationNumber10/182,986-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2002
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