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휘발성　베타－디（알콕시시카르보닐）레이트의　유기　금속　전구체　및　이를 이용한　산화금속　박막의　제조　방법

Author

우경자; 최광진; 조영상; 심상준

Assignee

한국과학기술연구원

Regitration Date

2002-10-31

Registration No.

361015

Application Date

2000-05-20

Application No.

00-27276

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88150

Appears in Collections:

KIST Patent > 2000

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