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dc.contributor.authorSUK JEA KOUN-
dc.contributor.authorJiwon Yune-
dc.contributor.authorLIM, WEON CHEOL-
dc.contributor.authorMoon, Sung Wook-
dc.contributor.authorJoon Kon Kim-
dc.contributor.authorJaeyong Lee-
dc.contributor.authorSONG, JONG HAN-
dc.date.accessioned2024-01-12T13:41:58Z-
dc.date.available2024-01-12T13:41:58Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88336-
dc.languageEnglish-
dc.publisher8.21~26, 부산-
dc.titleLarge area carbon membrane splitting from single diamond bulk substrate by using carbon and hydrogen co-implantation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational Vacuum Congress (IVC-20)-
dc.citation.titleInternational Vacuum Congress (IVC-20)-
dc.citation.conferencePlaceKO-
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KIST Conference Paper > Others
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