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dc.contributor.author김소희-
dc.contributor.author홍지현-
dc.contributor.author백우석-
dc.contributor.author강인영-
dc.contributor.author안재평-
dc.date.accessioned2024-01-12T14:01:46Z-
dc.date.available2024-01-12T14:01:46Z-
dc.date.issued2022-06-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88494-
dc.title나노 인덴터를 위한 기체 교환 장치-
dc.typePatent-
dc.date.registration2022-06-23-
dc.date.application2020-08-13-
dc.identifier.patentRegistrationNumber10-2413749-0000-
dc.identifier.patentApplicationNumber10-2020-0101573-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2020
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