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라멜라 패턴을 갖는 블록-공중합체 박막 중의 결함에 대한 정량적 측정방법

Author

권석준; 박재관; 한일기; 강준현; 고형덕; 강진구; 강구민; 이관일

Assignee

한국과학기술연구원

Regitration Date

2020-10-26

Registration No.

2172425

Application Date

2018-11-20

Application No.

10-2018-0143614

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88622

Appears in Collections:

KIST Patent > 2018

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