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dc.contributor.author김영환-
dc.contributor.author최진일-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T15:01:47Z-
dc.date.available2024-01-12T15:01:47Z-
dc.date.issued2014-02-18-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89680-
dc.title레이저 간섭 리소그래피를 이용한 상변화 메모리 제조방법-
dc.typePatent-
dc.date.registration2014-02-18-
dc.date.application2012-11-09-
dc.identifier.patentRegistrationNumber8,652,876-
dc.identifier.patentApplicationNumber13/672,943-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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