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dc.contributor.author최지원-
dc.contributor.author윤석진-
dc.contributor.author김윤회-
dc.contributor.author강종윤-
dc.contributor.author장호원-
dc.contributor.author김진상-
dc.date.accessioned2024-01-12T15:02:26Z-
dc.date.available2024-01-12T15:02:26Z-
dc.date.issued2013-01-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89732-
dc.title저온공정용 유전체 박막 및 그 제조방법-
dc.typePatent-
dc.date.registration2013-01-02-
dc.date.application2011-05-24-
dc.identifier.patentRegistrationNumber10-1219474-
dc.identifier.patentApplicationNumber2011-0048804-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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