DSpace at KISTKIST Patent2011

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dc.contributor.author전영민-
dc.contributor.author황정민-
dc.contributor.author장지웅-
dc.contributor.author박민철-
dc.contributor.author이택진-
dc.contributor.author김선호-
dc.contributor.author이석-
dc.contributor.author김재헌-
dc.contributor.author우덕하-
dc.date.accessioned2024-01-12T15:02:28Z-
dc.date.available2024-01-12T15:02:28Z-
dc.date.issued2013-05-02-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/89736-
dc.title마스크 패턴 검사용 3차원 영상 획득 시스템 및 그 방법-
dc.typePatent-
dc.date.registration2013-05-02-
dc.date.application2011-08-10-
dc.identifier.patentRegistrationNumber10-1262269-
dc.identifier.patentApplicationNumber2011-0079483-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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