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Fabrication of MoS2 few-layer by Off-axis sputtering

Authors

OH TAEKYUNG; Min Hyung Seob; Lee Gyo Sub; Hyungtak Jeon; Lee, Jeon Kook

Publisher

10.25~29, 제주

Citation

International conference of advanced materials (IUMRS-ICAM 2015)

Keywords

MoS2; 2-D material; thin film; sputtering; annealing

URI

https://pubs.kist.re.kr/handle/201004/89907

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KIST Conference Paper > Others

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