DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorKim Yong Soo-
dc.contributor.authorPark June-
dc.contributor.authorPark Han Young-
dc.contributor.authorHamin Sung-
dc.contributor.authorJomsool Kim-
dc.contributor.authorSeung Beom Lee-
dc.contributor.authorHyun Woo Cho-
dc.contributor.authorJu Han Lee-
dc.contributor.authorPark, Min-Chul-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T15:34:41Z-
dc.date.available2024-01-12T15:34:41Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90466-
dc.languageEnglish-
dc.subjectCSM-
dc.subjectHHG-
dc.subjectEUV-
dc.subjectEUV Mask Inspection-
dc.subjectCoherence-
dc.titleActinic EUV Mask Inspection using Coherent EUV Source based on High-order Harmonic Generation-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationConference on Laser and Electro-Optics Pacific Rim(CLEO-PR), v.26F2-4, pp.1 - 2-
dc.citation.titleConference on Laser and Electro-Optics Pacific Rim(CLEO-PR)-
dc.citation.volume26F2-4-
dc.citation.startPage1-
dc.citation.endPage2-
dc.citation.conferencePlaceUS-
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