DSpace at KISTKIST Patent2000

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dc.contributor.author송종한-
dc.contributor.author김태곤-
dc.contributor.author양정수-
dc.contributor.author최원국-
dc.contributor.author황정남-
dc.date.accessioned2024-01-12T16:01:11Z-
dc.date.available2024-01-12T16:01:11Z-
dc.date.issued2002-08-21-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90792-
dc.title금속이온을　포함하는　플라즈마를　이용한　금속박막　형성방법-
dc.typePatent-
dc.date.registration2002-08-21-
dc.date.application2000-08-11-
dc.identifier.patentRegistrationNumber351197-
dc.identifier.patentApplicationNumber00-46490-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2000
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