DSpace at KISTKIST PatentOthers

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dc.contributor.author장홍규-
dc.contributor.author최원국-
dc.contributor.author정형진-
dc.contributor.author고석근-
dc.date.accessioned2024-01-12T16:03:06Z-
dc.date.available2024-01-12T16:03:06Z-
dc.date.issued1999-01-05-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90973-
dc.title박막　증착　장치-
dc.typePatent-
dc.date.registration1999-01-05-
dc.date.application1997-02-07-
dc.identifier.patentRegistrationNumber5,855,683-
dc.identifier.patentApplicationNumber08/797,255-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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