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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.contributor.author최우범-
dc.contributor.author정지원-
dc.date.accessioned2024-01-12T16:30:27Z-
dc.date.available2024-01-12T16:30:27Z-
dc.date.issued2001-01-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/91287-
dc.title반도체　기판의　정전　열　접합방법-
dc.typePatent-
dc.date.registration2001-01-11-
dc.date.application1997-09-11-
dc.identifier.patentRegistrationNumber286252-
dc.identifier.patentApplicationNumber97-46678-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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