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dc.contributor.author이전국-
dc.date.accessioned2024-01-12T16:30:58Z-
dc.date.available2024-01-12T16:30:58Z-
dc.date.issued2002-07-30-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/91335-
dc.title대면적　산화물　박막　형성장비의 샤워헤드-
dc.typePatent-
dc.date.registration2002-07-30-
dc.date.application1999-01-28-
dc.identifier.patentRegistrationNumber348587-
dc.identifier.patentApplicationNumber99-2743-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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